JPH0173958U - - Google Patents
Info
- Publication number
- JPH0173958U JPH0173958U JP1987169937U JP16993787U JPH0173958U JP H0173958 U JPH0173958 U JP H0173958U JP 1987169937 U JP1987169937 U JP 1987169937U JP 16993787 U JP16993787 U JP 16993787U JP H0173958 U JPH0173958 U JP H0173958U
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- light
- excimer laser
- laser
- laser oscillation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010355 oscillation Effects 0.000 claims 2
- 238000012806 monitoring device Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987169937U JPH0173958U (en]) | 1987-11-06 | 1987-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987169937U JPH0173958U (en]) | 1987-11-06 | 1987-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0173958U true JPH0173958U (en]) | 1989-05-18 |
Family
ID=31460439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987169937U Pending JPH0173958U (en]) | 1987-11-06 | 1987-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0173958U (en]) |
-
1987
- 1987-11-06 JP JP1987169937U patent/JPH0173958U/ja active Pending